Aerotech ABL9000 Air Bearing Stage
The ABL9000 is simply the world’s highest performance air bearing. Designed to meet the exacting requirements of wafer, flat panel display, and optical inspection and fabrication, the ABL9000 sets new standards of performance.
行程：≤1200 mm
定位精度：±0.5 µm
重複定位精度：±0.1 µm
直線度：±0.50µm
平面度：±0.50µm
